Lithographic apparatus and device manufacturing method

ABSTRACT

An apparatus and a method to hold a patterning device configured to impart a beam of radiation with a pattern in its cross-section. The apparatus includes a base configured to support the patterning device and an inner cover couplable to the base. The inner cover includes a restraining mechanism that, upon an application of a force external to the inner cover, is configured to provide an in-plane force to the patterning device to restrain movement of the patterning device, the in-plane force being substantially parallel to a patterning surface of the patterning device.

This application is a continuation-in-part of PCT Patent ApplicationSerial No. PCT/EP2012/058876, filed May 14, 2012, which claims priorityto U.S. Provisional Patent Application Ser. No. 61/510,913, filed Jul.22, 2011, which are both incorporated by reference in their entiretiesherein.

FIELD

The present invention relates to a patterning device container, alithographic apparatus and a device manufacturing method.

BACKGROUND

A lithographic apparatus is a machine that applies a desired patternonto a substrate, usually onto a target portion of the substrate. Alithographic apparatus can be used, for example, in the manufacture ofintegrated circuits (ICs). In that instance, a patterning device, whichis alternatively referred to as a mask or a reticle, may be used togenerate a circuit pattern to be formed on an individual layer of theIC. This pattern can be transferred onto a target portion (e.g.comprising part of, one, or several dies) on a substrate (e.g. a siliconwafer). Transfer of the pattern is typically via imaging onto a layer ofradiation-sensitive material (resist) provided on the substrate. Ingeneral, a single substrate will contain a network of adjacent targetportions that are successively patterned. Known lithographic apparatusinclude so-called steppers, in which each target portion is irradiatedby exposing an entire pattern onto the target portion at one time, andso-called scanners, in which each target portion is irradiated byscanning the pattern through a radiation beam in a given direction (the“scanning”-direction) while synchronously scanning the substrateparallel or anti-parallel to this direction. It is also possible totransfer the pattern from the patterning device to the substrate byimprinting the pattern onto the substrate.

In order to be able to project ever smaller structures onto substrates,it has been proposed to use extreme ultraviolet (EUV) radiation which iselectromagnetic radiation generally having a wavelength within the rangeof 10-20 nm, for example within the range of 13-14 nm. It has furtherbeen proposed that EUV radiation with a wavelength of less than 10 nmcould be used, for example within the range of 5-10 nm such as 6.7 nm or6.8 nm.

An EUV patterning device may be stored, transported, and loaded into alithography tool by a patterning device container. An example containeris a dual pod which allows for significant protection of the patterningdevice from contamination. The dual pod has an EUV outer pod thatencases an EUV inner pod (EIP). The EIP holds the patterning devicedirectly.

SUMMARY

An EIP (or other patterning device container) may support the patterningdevice on four (4) points on the front or quality surface of thepatterning device, outside of the used or quality area. In addition, thepatterning device may be loaded against these points by four (4) otherpoints on the back surface of the patterning device, thus effectivelyclamping the patterning device. This configuration constrains thepatterning device in three degrees of freedom (DOE) (out-of-plane, notparallel to a patterning surface of the patterning device) directly viafour (4) front side mounting points. The patterning device is furtherconstrained in the remaining three DOF (in-plane, parallel to thepatterning surface of the patterning device) by the friction between thepatterning device and the mounting points.

This design should prevent the patterning device from sliding relativeto the mounts during handling and shipping. However, even small slidingof the patterning device may result in an unacceptably highcontamination of the patterning device. Because the patterning device isconstrained in three DOF (in-plane) only by friction, the ability ofthis constraint to prevent sliding is determined by the clamping forceand the coefficient of friction. The clamping force is limited due topractical considerations in the design of the pod. Further,contamination may be generated from clamping with too much force.

An EIP design using friction to constrain the in-plane DOFs may allowthe patterning device to slide due to a ˜4 g side load to the outer pod(g=˜9.8 m/s²). This represents contamination risk arising from handlingof a pod and a risk/complexity for shipping the pod.

It would be advantageous, for example, to provide a patterning devicecontainer where a side edge of the patterning device is contacted inorder to constrain the patterning device in the three DOF (in-plane) viadirect contact, and not just via friction and/or clamping on the frontand/or back surface of the patterning device. Further, it would beadvantageous, for example, to achieve such restraint of the patterningdevice by moving one or more constraints to contact the patterningdevice with a force that is light enough to not significantly slide thepatterning device. In an embodiment, after contact with the patterningdevice, the constraints may be locked in place with enough force toresist on the order of a 30g force to prevent or reduce patterningdevice sliding during shipping and/or handling.

According to an aspect, there is provided an apparatus, comprising:

a base configured to support a patterning device configured to impart abeam of radiation with a pattern in its cross-section; and

an inner cover couplable to the base, the inner cover comprising arestraining mechanism that, upon an application of a force external tothe inner cover, is configured to provide an in-plane force to thepatterning device to restrain movement of the patterning device, thein-plane force being substantially parallel to a patterning surface ofthe patterning device.

According to a further aspect, there is provided a method to process apatterning device configured to impart a beam of radiation with apattern in its cross-section, the method comprising:

placing the patterning device upon a base;

coupling an inner cover to the base, the inner cover comprising arestraining mechanism; and

applying a force external to the inner cover to the restrainingmechanism such that the restraining mechanism provides an in-plane forceto the patterning device to restrain movement of the patterning device,the in-plane force being substantially parallel to a patterning surfaceof the patterning device.

According to a further aspect, there is provided an apparatuscomprising:

a base configured to support a patterning device configured to impart abeam of radiation with a pattern in its cross-section; and

a restraining mechanism comprising:

-   -   a first member part of or coupled to a first brake member, the        first member configured to move in a first direction in response        to an external force to bend or pivot the first member;        -   a first block configured to engage the first brake member,            wherein the first member is configured to move the first            brake member into engagement with the first block; and        -   a pin, coupled to the first member and/or the first brake            member, configured to transmit a force in the first            direction to the patterning device and to substantially            prevent the patterning device from movement.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in whichcorresponding reference symbols indicate corresponding parts, and inwhich:

FIG. 1 schematically depicts a lithographic apparatus according to anembodiment of the invention;

FIG. 2 depicts a detailed schematic illustration of a lithographicapparatus according to an embodiment of the invention;

FIG. 3 depicts a support structure including a container for apatterning device according to an embodiment of the invention;

FIGS. 4A and 4B show top and bottom views of an EUV inner pod accordingto an embodiment of the invention;

FIG. 4C shows inside surfaces of an inner cover of the EUV inner podaccording to an embodiment of the invention;

FIG. 4D shows a view of a restraining mechanism for a patterning deviceaccording to an embodiment of the invention;

FIGS. 5A-5D show views of a leaf spring mechanism to restrain in-planemovement of the patterning device according to an embodiment of theinvention;

FIG. 5E shows a plot of a relationship between a flexure angle andcoefficient of friction on a fixed block according to an embodiment ofthe invention;

FIG. 6 shows a cross-sectional view of a leaf spring mechanism accordingto an embodiment of the invention;

FIGS. 7A and 7B show a leaf spring mechanism to clamp the patterningdevice according to an embodiment of the invention;

FIGS. 8A and 8B show a distribution of forces on the patterning deviceaccording to an embodiment of the invention;

FIGS. 9A and 9B show a distribution of forces and a coupling ofmovements of parts of the leaf spring mechanism of FIGS. 5A-5C,respectively, according to an embodiment of the invention;

FIG. 10 depicts a schematic of a filter arrangement to hinder or preventmovement of contaminant particles from or to the EUV inner pod accordingto an embodiment of the invention;

FIG. 11 shows a cross-sectional view of a filter arrangement accordingto an embodiment of the invention;

FIGS. 12A-12C show an arrangement of V-shaped grooves on a base of theinner pod according to an embodiment of the invention; and

FIG. 13 shows an arrangement of a mesa to hinder or prevent particlesfrom entering a volume over the patterning device according to anembodiment of the invention.

DETAILED DESCRIPTION

FIG. 1 schematically depicts a lithographic apparatus 1 according to oneembodiment of the invention. The apparatus comprises:

an illumination system (illuminator) IL configured to condition aradiation beam B (e.g. UV radiation or DUV radiation);

a support structure (e.g. a mask table) MT constructed to hold apatterning device (e.g. a mask) MA and connected to a first positionerPM configured to accurately position the patterning device in accordancewith certain parameters;

a substrate table (e.g. a wafer table) WT constructed to hold asubstrate (e.g. a resist-coated wafer) W and connected to a secondpositioner PW configured to accurately position the substrate inaccordance with certain parameters; and

a projection system (e.g. a refractive projection lens system) PSconfigured to project a pattern imparted to the radiation beam B bypatterning device MA onto a target portion C (e.g. comprising one ormore dies) of the substrate W.

The illumination system may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic, electrostaticor other types of optical components, or any combination thereof, todirect, shape, or control radiation.

The support structure holds the patterning device in a manner thatdepends on the orientation of the patterning device, the design of thelithographic apparatus, and other conditions, such as for examplewhether or not the patterning device is held in a vacuum environment.The support structure can use mechanical, vacuum, electrostatic or otherclamping or restraining techniques to hold the patterning device. Thesupport structure may be a frame or a table, for example, which may befixed or movable as required. The support structure may ensure that thepatterning device is at a desired position, for example with respect tothe projection system. Any use of the terms “reticle” or “mask” hereinmay be considered synonymous with the more general term “patterningdevice.”

The term “patterning device” used herein should be broadly interpretedas referring to any device that can be used to impart a radiation beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. The patterning device has a patterningsurface on which the pattern resides, and that is used to impart thepattern to the radiation beam. It should be noted that the patternimparted to the radiation beam may not exactly correspond to the desiredpattern in the target portion of the substrate, for example if thepattern includes phase-shifting features or so called assist features.Generally, the pattern imparted to the radiation beam will correspond toa particular functional layer in a device being created in the targetportion, such as an integrated circuit.

The patterning device may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions. The tilted mirrorsimpart a pattern in a radiation beam which is reflected by the mirrormatrix.

The term “projection system” used herein should be broadly interpretedas encompassing any type of projection system, including refractive,reflective, catadioptric, magnetic, electromagnetic and electrostaticoptical systems, or any combination thereof, as appropriate for theexposure radiation being used, or for other factors such as the use ofan immersion liquid or the use of a vacuum. Any use of the term“projection lens” herein may be considered as synonymous with the moregeneral term “projection system”.

As here depicted, the apparatus is of a reflective type (e.g. employinga programmable mirror array of a type as referred to above, or employinga reflective mask). Alternatively, the apparatus may be of atransmissive type (e.g. employing a transmissive mask).

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more support structures). In such“multiple stage” machines the additional tables/support structures maybe used in parallel, or preparatory steps may be carried out on one ormore tables/support structures while one or more other tables/supportstructures are being used for exposure.

Referring to FIG. 1, the illuminator IL receives a radiation beam from aradiation source SO. The source and the lithographic apparatus may beseparate entities, for example when the source is an excimer laser. Insuch cases, the source is not considered to form part of thelithographic apparatus and the radiation beam is passed from the sourceSO to the illuminator IL with the aid of a beam delivery system BDcomprising, for example suitable directing mirrors and/or a beamexpander. In other cases the source may be an integral part of thelithographic apparatus, for example when the source is a mercury lamp.The source SO and the illuminator IL, together with the beam deliverysystem BD if required, may be referred to as a radiation system.

The illuminator IL may comprise an adjuster AD configured to adjust theangular intensity distribution of the radiation beam. Generally, atleast the outer and/or inner radial extent (commonly referred to asσ-outer and σ-inner, respectively) of the intensity distribution in apupil plane of the illuminator can be adjusted. In addition, theilluminator IL may comprise various other components, such as anintegrator IN and a condenser CO. The illuminator may be used tocondition the radiation beam, to have a desired uniformity and intensitydistribution in its cross-section.

The radiation beam B is incident on the patterning device (e.g., mask)MA, which is held on the support structure (e.g., mask table) MT, and ispatterned by the patterning device. Having traversed the patterningdevice MA, the radiation beam B passes through the projection system PS,which focuses the beam onto a target portion C of the substrate W. Withthe aid of the second positioner PW and position sensor IF (e.g. aninterferometric device, linear encoder or capacitive sensor), thesubstrate table WT can be moved accurately, e.g. so as to positiondifferent target portions C in the path of the radiation beam B.Similarly, the first positioner PM and another position sensor (which isnot explicitly depicted in FIG. 1) can be used to accurately positionthe patterning device MA with respect to the path of the radiation beamB, e.g. after mechanical retrieval from a mask library, or during ascan. In general, movement of the support structure MT may be realizedwith the aid of a long-stroke module (coarse positioning) and ashort-stroke module (fine positioning), which form part of the firstpositioner PM. Similarly, movement of the substrate table WT may berealized using a long-stroke module and a short-stroke module, whichform part of the second positioner PW. In the case of a stepper (asopposed to a scanner) the support structure MT may be connected to ashort-stroke actuator only, or may be fixed. Patterning device MA andsubstrate W may be aligned using patterning device alignment marks M1,M2 and substrate alignment marks P1, P2. Although the substratealignment marks as illustrated occupy dedicated target portions, theymay be located in spaces between target portions (these are known asscribe-lane alignment marks). Similarly, in situations in which morethan one die is provided on the patterning device MA, the patterningdevice alignment marks may be located between the dies.

The depicted apparatus could be used in at least one of the followingmodes:

1. In step mode, the support structure MT and the substrate table WT arekept essentially stationary, while an entire pattern imparted to theradiation beam is projected onto a target portion C at one time (i.e. asingle static exposure). The substrate table WT is then shifted in the Xand/or Y direction so that a different target portion C can be exposed.In step mode, the maximum size of the exposure field limits the size ofthe target portion C imaged in a single static exposure.

2. In scan mode, the support structure MT and the substrate table WT arescanned synchronously while a pattern imparted to the radiation beam isprojected onto a target portion C (i.e. a single dynamic exposure). Thevelocity and direction of the substrate table WT relative to the supportstructure MT may be determined by the (de-)magnification and imagereversal characteristics of the projection system PS. In scan mode, themaximum size of the exposure field limits the width (in the non-scanningdirection) of the target portion in a single dynamic exposure, whereasthe length of the scanning motion determines the height (in the scanningdirection) of the target portion.

3. In another mode, the support structure MT is kept essentiallystationary holding a programmable patterning device, and the substratetable WT is moved or scanned while a pattern imparted to the radiationbeam is projected onto a target portion C. In this mode, generally apulsed radiation source is employed and the programmable patterningdevice is updated as required after each movement of the substrate tableWT or in between successive radiation pulses during a scan. This mode ofoperation can be readily applied to maskless lithography that utilizesprogrammable patterning device, such as a programmable mirror array of atype as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

FIG. 2 shows the apparatus 1 in more detail, including a radiationsource SO, an illumination optics unit IL, and the projection system PS.The radiation source SO includes a radiation emitter 2 which maycomprise a discharge plasma. EUV radiation may be produced by a gas orvapor, such as Xe gas or Li vapor in which a very hot plasma is createdto emit radiation in the EUV radiation range of the electromagneticspectrum. The very hot plasma is created by causing a partially ionizedplasma of an electrical discharge to collapse onto an optical axis O.Partial pressures of e.g. 10 Pa of Xe or Li vapor or any other suitablegas or vapor may be desired for efficient generation of the radiation.In some embodiments, tin may be used. The radiation emitted by radiationemitter 2 is passed from a source chamber 3 into a collector chamber 4.In an embodiment, the radiation source SO includes the source chamber 3and collector chamber 4.

The collector chamber 4 includes a contamination trap 5 and grazingincidence collector 6 (shown schematically as a rectangle). Radiationallowed to pass through the collector 6 is reflected off a gratingspectral filter 7 to be focused in a virtual source point 8 at anaperture in the collector chamber 4. From collector chamber 4, a beam ofradiation 9 is reflected in illumination optics unit IL via first andsecond normal incidence reflectors 10, 11 onto a patterning device(e.g., a mask) positioned on support structure MT. A patterned beam 12is formed which is imaged in projection system PL via first and secondreflective elements 13, 14 onto a substrate (not shown) held on asubstrate table WT. More elements than shown may generally be present inillumination optics unit IL and projection system PL.

FIG. 3 shows a container 300, in which an EUV radiation reflectivepatterning device MA is stored for transportation, storage and/orhandling purposes. Container 300 comprises an outer cover 302, an outerbase 310, and an inner pod 304. Inner pod 304 includes an inner cover306 (interchangeably referred to as “cover 306”) and an inner base 308(interchangeably referred to as “base 308”), all of which may be jointlyreferred to as a dual pod. Patterning device MA is held inside inner pod304 on base 308, although in an embodiment, patterning device MA may beheld by cover 306. In this example, patterning device MA is held by oneor more restraining mechanisms. Inside container 300, an atmosphere of aprotective (inert) gas may be maintained, for example, at a pressureabove ambient pressure. However, a vacuum may instead be maintainedinside container 300. In the latter case, a sufficient sealing may beprovided between outer cover 302 and outer base 310 and/or between cover306 and base 308 to prevent or hinder a gas flow between the inside ofcontainer 300 and its ambient environment that may contaminate theinside environment of container 300. Patterning device MA may be placedin inner pod 304 immediately after production or after a scanningprocedure, ensuring that patterning device MA is substantially free ofcontamination when it is placed in inner pod 304. When placed insideinner pod 304, patterning device MA is substantially shielded fromcontaminants.

As disclosed in detail herein, inner pod 304 includes one or morerestraining mechanisms to help reduce or prevent sliding or movement ofpatterning device MA that may generate particles, which could renderpatterning device MA less effective and potentially useless forphotolithography operation. By way of example, such a restrainingmechanism may include one or more selected from: a clamp, a groove, apin, a fixation block, a spring, and/or the like.

In an embodiment, there is no metallic contact between inner cover 306and inner base 308, as will be discussed below. Inner pod 304, withinner cover 306 coupled to inner base 308 in a closed position holdingpatterning device MA, rests securely on outer base 310 with outer cover302 closed with outer base 310. In an embodiment, such an arrangementmay be reversed where inner pod 304 can be arranged to be attached to aninside area (not visible in FIG. 3) of outer cover 302, and be broughtin secure closure with outer base 310. In an embodiment, the particularorientation of inner cover 306 and inner base 308 as shown in FIG. 3 maybe interchanged. For example, base 308 may be brought into closure withinner cover 306 such that base 308 rests on top of inner cover 306 withpatterning device MA facing in a downward direction (−Z axis) relativeto the base 308 as opposed to in an upward direction (+Z axis) as shownin FIG. 3. Similarly, other arrangements can be contemplated for outercover 302 and outer base 310.

In an embodiment, a surface of outer cover 302 and/or outer base 310 maybe transparent to a beam of radiation. In an embodiment, outer cover 302and/or outer base 310 may be opaque. Similarly, in an embodiment, asurface of inner cover 306 and/or inner base 308 may be transparent to abeam of radiation. In an embodiment, inner cover 306 and/or inner base308 may be opaque. Where a transparent surface is provided, patterningdevice MA can be scanned for, for example, particles and/or alignedthrough such transparent surface. The transparent surface may be glassor plexiglass.

FIG. 4A illustrates a top view of an embodiment of inner pod 304 showingvarious structural features of a top surface of inner cover 306 attachedto inner base 308. In the top view, an example of a mechanism torestrict movement of patterning device MA inside inner pod 304 includesvarious pins for fixation in three mutually perpendicular directions(e.g., X, Y, and Z axis corresponding to respective degrees of freedom).For example, pins 402 a and 402 b are pushed in a downward direction (−Zaxis towards inner base 308) by a corresponding pin/ball mechanism (notshown) in an inside surface of outer cover 302 to restrain motion ofpatterning device MA inside inner pod 304 in the X-direction (and atleast partly in the θ_(z), direction). Similarly, pins 404 a and 404 bare pushed in a downward direction (−Z axis) by a corresponding pin/ballmechanism (not shown) in the inside surface of outer cover 302 torestrain motion of patterning device MA inside inner pod 304 in theY-direction (and at least partly in the θ_(z), direction). In addition,four pins 406 a-406 d provide fixation or clamping of patterning deviceMA in the Z-direction by a corresponding pin/ball mechanism (not shown)in an inside surface of outer cover 302. When the inner surface of outercover 302 comes into contact with the outer surface of the inner pod304, the various pins 402-406 are engaged by a corresponding mechanismor structure on the inner surface of the outer cover 302.

Additionally, the top surface of inner cover 306 has one or more filtercovers 420 a-420 d as part of a filter mechanism to pump a gas in achamber formed inside inner pod 304, and/or to vent gas out from thechamber, as will be described with respect to FIGS. 10 and 11. Filtercovers 420 a-420 d are attached to cover 306 by one or more screws, forexample, although other mechanisms for attachment of filter covers 420a-420 d may be used. Cover 306 has one or more side projections 422a-422 b that may provide attachment to outer cover 302 at respectivecut-out portions 424 a and 424 b, when outer cover 302 is brought incontact with inner pod 304. Additionally or alternatively, the sideprojections 422 a-422 b may be used to hold the inner cover 306 todisconnect inner base 308 and inner cover 306 from each other by, forexample, lowering base 308 from the cover 306 and/or lifting cover 306using the side projections 422 a-442 b from base 308. It is to be notedthat the number of pins, filter covers, projections, etc. shown in FIG.4A is by way of example only; other numbers of such elements may beused. Similarly, the orientation and positioning of the elements isexemplary only, and is not meant to be limiting. For example, each ofthe elements 402 a-402 b, 404 a-404 b, 406 a-406 d, side projections 422a-422 b, cut-out portions 424 a-424 b, and filter covers 420 a-420 d canbe located in other regions of the cover 306 and/or be located on base308.

FIG. 4B shows a bottom view of an embodiment of inner pod 304 showing abottom surface of inner base 308. The bottom side of base 308 has threeV-shaped grooves V1-V3. In an embodiment, V-shaped grooves V1-V3 areseparable components from base 308 and are attached to the base 308 viaone or more screws, although another type of attachment could be used.Additionally, other numbers and/or other shapes of grooves may be used.V-shaped grooves V1-V3 are arranged to accommodate or receive pins onouter base 310 (not shown) which when in contact with V-shaped groovesV1-V3 operate to restrain movement of inner pod 304 during storage,handling and/or transportation. In an embodiment, the V-shaped groovescomprise a diamond-like carbon (DLC) material. Additionally oroptionally, the bottom side of base 308 includes sockets R1-R4 forreceiving additional corresponding pins on outer base 310 when inner pod304 is placed on outer base 310. It is to be noted that the bottom sideof inner base 308 may be designed to accommodate additional grooves andsockets, depending upon specific applications.

FIG. 4C illustrates an inside view of inner cover 306 of inner pod 304.The inside surface includes a first surface 470 and a second surface 472in a plane different from a plane containing first surface 470, andlying at a periphery of cover 306. Second surface 472 includes a hollow430 that holds or can accommodate an O-ring seal (not shown) to preventdirect metallic contact between inner cover 306 and base 308. Secondsurface 472 has one or more pins shown as balls B1-B3 for placement intocorresponding V-shaped grooves on base 308, as shown in FIGS. 12A-12C,although other shapes instead of balls (e.g., pointed/tapered pins) maybe used. First surface 470 includes one or more contact pins 704 toclamp patterning device MA in a direction towards inner base 308. Firstsurface 470 also includes one or more contact pins 504 to engage andrestrain patterning device MA in a plane substantially parallel to thepatterning device holding surface of inner base 308, i.e., in a planesubstantially parallel to the front surface of patterning device MA.Further, first surface 470 includes covered holes H1-H4 (only H1-H3shown) to allow, for example, a patterning device alignment beam toreach the patterning device MA. Additionally, one or more cut-outs C1-C8may be provided on second surface 472 to accommodate support pins 408a-408 h of FIG. 4D.

Inner cover 306 includes one or more restraining mechanisms (not shown)having, in an embodiment, one or more leaf spring arrangements shown,e.g., in FIG. 4D with surfaces 470 and 472 removed for visual clarity.The leaf spring arrangement interacts with patterning device MA uponapplication of a force external to inner pod 304 to restrain movement ofpatterning device MA, resulting in a minimization of particle generationin inner pod 304. In particular, the leaf spring attachment may beconnected to the one or more contact pins 704 and/or the one or morecontact pins 504. Further, the leaf spring attachment may be connectedto the pins 402, pins 404 and/or pins 406. In one embodiment, innercover 306 has additional restraining mechanism that provides anout-of-plane force to restrain patterning device MA. For example, suchout-of-plane force may be perpendicular to the in-plane force, and maybe used for clamping patterning device MA.

FIG. 4D illustrates inner base 308 with patterning device MA placed onbase 308, and restrained by various components of the restrainingmechanism, as described below. The restraining mechanism as shown inFIG. 4D does not include the outer shell with surfaces 470 and 472 ofinner cover 306 inside which this restraining mechanism actuallyresides. Base 308 includes one or more limit pins 408 a-408 h (only 408a, 408 b, and 408 c are visible in FIG. 4D) that can, in exceptionalcircumstances, contact patterning device MA at different sides ofpatterning device MA to limit in-plane (X, Y and θ_(z)) movementthereof. Pins 402 a-402 b, 404 a-404 b, and 406 a-406 d are parts ofleaf spring restraining mechanisms that restrict movement of patterningdevice MA, e.g., when outer cover 302 is brought in contact with innercover 306. Specifically, when outer cover 302 comes in contact withinner cover 306 to push pins 402 a-402 b, 404 a-404 b, and 406 a-406 d,the respective leaf spring mechanisms associated with pins 402 a-402 b,404 a-404 b, and 406 a-406 d are actuated to restrain or fixatepatterning device MA in place. In an embodiment, the leaf springmechanisms can be activated when inner cover 306 is brought in contactwith base 308, e.g., when base 308 is on top on cover 306 and resting oncover 306. Generally, the leaf spring mechanism is activated by anyforce external to inner cover 306 being applied at one or more of pins402 a-402 b, 404 a-404 b, and 406 a-406 d. It is to be noted thatalthough a leaf spring mechanism is illustrated because it may helpminimize contaminant particles resulting from contact between variouselements in inner pod 304, in another embodiment, another mechanism suchas regular springs may be used instead of or in addition to a leafspring mechanism to restrain patterning device MA. Further, the leafspring mechanism can be integrally fabricated as part of inner cover306, or can be attached using screws or latches. Operation of the leafspring mechanism is described in more detail with respect to FIGS.5A-5C, 6, and 7A-7B.

FIGS. 5A-5C illustrate an exemplary restraining mechanism arranged torestrain movement of patterning device MA in X, Y and θ_(z) directionsalong a plane substantially parallel to the patterning surface ofpatterning device MA. FIG. 5A illustrates a leaf spring mechanism 500formed in inner cover 306 (not shown) that has a first pair of leafsprings including a leaf spring L1 and a leaf spring L2 joined togetherby a fixation block 502 a at one end of each of leaf springs L1 and L2.The leaf springs L1 and L2 are each attached at their respective othersends to blocks 510 a and 510 b, respectively. One or more fasteners 508may be used to fasten the leaf springs L1 and L2 to blocks 510 a and 510b and/or to fasten blocks 510 a and 510 b (and the leaf springs L1 andL2) to another structure. Fixation block 502 a includes a pin, forexample, one of pins 402 a, 402 b, 404 a, or 404 b, depending upon adirection of restraining provided by leaf spring mechanism 500, toreceive an external force, e.g., from outer cover 302. In an embodiment,the pin can be an integral part of fixation block 502 a itself, and maybe in a different shape (e.g., a tapered shape or a rectangular block).Further, an extended part of fixation block 502 a itself can perform thesame function as the pins 402 a, 402 b, 404 a, or 404 b such thatfixation block 502 a directly receives the external force to actuateleaf spring mechanism 500.

When pushed towards base 308, e.g., at pin 402 a, fixation block 502 amoves downward towards base 308. Such downward motion of fixation block502 a causes leaf spring pair L1, L2 to move from a first position to astretched second position that further causes a block 502 b to movetowards patterning device MA along a plane substantially parallel to thepatterning surface of patterning device MA. Such motion of block 502 bis shown, by way of example only, using an arrow adjacent block 502 b inFIG. 5B. Further, the downward movement may bring fixation block 502 ain contact with or into near contact with a fixation block 502 c that isconnected to leaf spring pair L5 illustrated in FIGS. 5B and 5C.

Leaf spring mechanism 500 includes a second pair of leaf springs L3 andL4 arranged to move in a plane perpendicular to a plane of movement ofleaf spring pair L1, L2. Leaf springs L3 and L4 at one end are joinedtogether by block 502 b. Leaf springs L3 and L4 at respective other endsare joined to blocks 510 a and 510 b respectively. When fixation block502 a moves down, it causes the first leaf spring pair L1, L2 to stretchand push blocks 510 a and 510 b away from each other, as illustrated bythe directional arrows adjacent blocks 510 a and 510 b. As describedwith respect to FIG. 5B, it is this movement of blocks 510 a and 510 bthat is transmitted by mechanical coupling via leaf springs L3 and L4 tomove block 502 b and thereby pin 504 to provide an in-plane force thatrestrains movement of patterning device MA without little or nogeneration of contaminant particles due to excessive sliding or contact.

FIG. 5B shows a top view of a part of leaf spring mechanism 500 withleaf spring pair L1, L2 removed for visual clarity purposes only. A setof leaf springs L7 and L8, each including one or more individual leafsprings are used to couple blocks 510 a and 510 b with ground parts 506of leaf spring mechanism 500. When blocks 510 a and 510 b are moved awayfrom each other by the stretching action of leaf springs L1, L2, leafsprings L7 and L8 bend and follow the motion of 510 a and 510 b,respectively. As a result, ends of leaf springs L3, L4 attached toblocks 510 a and 510 b also move away from each other causing the leafspring pair L3, L4 to stretch. The motion of leaf springs L3, L4 causesblock 502 b to move towards patterning device MA. Block 502 b when movedtowards patterning device MA, pushes fixation block 502 c such thatfixation block 502 c is aligned directly below fixation block 502 a.Such movement of block 502 b compresses a spring 606 that couples tofixation block 502 c and provides compressive force to fixation block502 c that causes pin 504 to contact patterning device MA. Contact withpin 504 provides an in-plane force to restrain patterning device MA asdescribed in the force diagram shown in FIGS. 8A and 8B. In thisconfiguration, there exists a pre-biasing force within a planesubstantially parallel to a patterning surface of patterning device MA,as described for example, in FIGS. 9A and 9B. In an embodiment, fixationblock 502 c, or an extension thereof, can be made to contact patterningdevice MA to provide the restraining in-plane force to patterning deviceMA.

When fixation block 502 a is moved downward, for example, using pin 402a when outer cover 302 comes in contact with inner cover 306 of innerpod 304, fixation block 502 a comes in contact with or into near contactwith fixation block 502 c. Such contact of fixation block 502 a withfixation block 502 c as a result of a downward force at pins 402 a, 402b, 404 a, or 404 b provides a locking opposing force to in-planemovement of patterning device MA. If the fixation block 502 a were innear contact with fixation block 502 c, then slight movement of thepatterning device MA may cause the fixation block 502 a and fixationblock 502 c to come into contact, at which time a locking opposing forceto in-plane movement of patterning device MA would be provided.

Leaf spring mechanism also includes a leaf spring L5 connecting block502 c with a ground part 506, the leaf spring L5 arranged to move in theX-direction (or, depending on the location of leaf spring mechanism 500,the Y-direction) cooperatively with movement of pin 504, and a leafspring L6 coupled to fixation block 502 c and arranged to cooperativelymove fixation block 502 c when pushed or contacted by blocks 502 aand/or 502 b to align a surface of fixation block 502 c with a surfaceof fixation block 502 a. FIG. 5C shows another view of leaf springmechanism 500.

FIG. 5D shows a further arrangement of an exemplary restrainingmechanism arranged to restrain movement of patterning device MA in X, Yand θ_(z) directions along a plane substantially parallel to thepatterning surface of patterning device MA. FIG. 5D illustrates amodified leaf spring mechanism 500′ formed in inner cover 306, andcoupled to inner base 308. In comparison with FIG. 5B, instead of block502 b receiving a force external to inner pod 304 and transmitting theforce to coil spring 606 that pushes fixation block 502 c and leafspring L6, in FIG. 5D block 502 b is coupled to members F1 and F2 onopposite sides of an X-axis running through the central portion of block502 b. These members F1 and F2 are in addition to leaf springs L3 andL4. Member F1 couples to a moveable brake member 507, and member F2couples to a moveable brake member 509. Likewise, instead of fixationblock 502 c coupled to leaf spring L6 (as illustrated in FIG. 5B),modified leaf spring mechanism 500′ comprises a fixation block 502 c′coupled to leaf spring L5 and pin 504 on one side of fixation block 502c′. In an embodiment, the fixation block 502 c′ is coupled to members F3and F4 on another side of block 502 c′. Similar to members F1 and F2,members F3 and F4 are arranged on opposite sides of fixation block 502c′ of an X-axis running through the central portion of block 502 c′.Member F3 further couples to moveable brake member 507 and member F4further couples to moveable brake member 509. In one arrangement, one ormore of the members F1-F4 is at least in part flexible (i.e., notrigid), and may bend, stretch, or compress. In an embodiment, one ormore of the members F1-F4 may have a pivoting feature, e.g., a bearing,at at least one end of the respective member F1-F4.

Further, modified leaf spring mechanism 500′ comprises a block 503 andblock 505, fixed relative to the brake members 507 and 509, arranged toengageably oppose or prevent motion of moveable brake members 507 and509, respectively, upon contact. Blocks 503 and 505 provide or act asadditional or alternative sources of friction to help prevent movementof patterning device MA compared to, for example, the frictional forcesin the embodiment of FIG. 5B.

Similar to the arrangement in FIG. 5B, in FIG. 5D a set of leaf springsL7 and L8, each including one or more individual leaf springs, arecoupled to ground parts 506 of modified leaf spring mechanism 500′. Itis to be noted that the specific number, orientation and arrangement offixation blocks 502 b, 502 b′, members F1-F4, moveable brake members509, 507, and blocks 503, 505, and other components of modified leafspring mechanism 500′ are by way of example only, and not by way oflimitation, and other numbers, orientations, or arrangements may becontemplated by one of ordinary skill in the art in view of thisdisclosure.

In use, upon application of an external force in the Z-direction, block502 b moves towards fixation block 502 c′ in a first direction (e.g.,X-direction as indicated by an arrow on block 502 b) due to movement ofvarious parts as described above with respect to the FIG. 5B. Thisexternal force is transmitted to, and may bend or cause pivoting of,members F1 and F2. Members F1 and F2 transmit the force to moveablebrake members 507 and 509, respectively. Further, via brake members 507and 509, the force is transmitted to, and may bend or cause pivoting of,members F3 and F4. Via members F3 and F4, the force further initiatesmovement of fixation block 502 c′, which is coupled to pin 504. Asresult, pin 504 may move toward patterning device MA in the X-direction,as indicated by an arrow adjacent pin 504, to retain the patterningdevice MA. Bending or pivoting of one or more the members F1-F4 mayresult in a movement of a respective brake member 507, 509 toward therespective block 503, 505 as indicated by arrows adjacent moveableblocks 507 and 509. Release or reduction of the external force canresult in pin 504 moving away from the patterning device MA in the Xdirection due to the action of one or more of the leaf springs L3, L4and/or L5.

On contact of the pin 504 with the patterning device MA, the brakemembers 507 and 509 may contact or engage respectively blocks 503 and505. Or, following contact of pin 504 with patterning device MA, one ormore of members F1-F4 may begin to bend or pivot, or continue bending orpivoting, until the respective brake members 507, 509 contact or engagerespective blocks 503, 505. In an embodiment, the brake members 507, 509move away from each other due to the bending or pivoting. At this timeof contact of the pin 504 with the patterning device MA, the movement ofthe patterning device MA is resisted by, e.g., a friction force betweenthe patterning device MA and one or more contact surfaces (e.g., betweenthe patterning device and one or more projections (such as pin 704)engaging the bottom and/or top surface of the patterning device) and/orby force applied to the patterning device (e.g., another pin 504—see.e.g, FIG. 8B).

On contact or engagement of moveable brake member 507 with block 503, afriction force in the X-direction comes into play. Likewise, uponcontact or engagement of moveable brake member 509 with block 505, afriction force in the X-direction comes into play. These friction forcesmay act as a counteracting force against a force from the patterningdevice MA (e.g., a force arising from sudden movement of the patterningdevice MA) to help keep the patterning device MA in position. Thus,these friction forces may effectively prevent movement of the patterningdevice MA. In this engaged position, brake members 507 and 509 may notslip or slide with respect to blocks 503 and 505, respectively. Thisessentially non-slip or slide condition is referred to as “self-locking”or “self-locked engagement” of brake members 507, 509 with blocks 503,505, respectively. In such self-locked engagement positions of brakemembers 507 and 509, any further increase of external force, e.g., fromouter cover 302, will not cause further displacement of pin 504 thatcontacts patterning device MA. Similarly, due to the self-locking ofbrake members 507 and 509, a force from the patterning device MA to thepin 504 will not move the brake members 507 and 509 in the X-directionor away from the blocks 503, 505. Should patterning device MA move awayfrom the pin 504 (and thus, e.g., out of contact with pin 504), theexternal force applied to fixation block 502 would cause the pin 504 tomove towards the patterning device MA. In addition, since ground parts506 are fixed in place using fasteners 508(1)-508(3), any force frompatterning device MA that pushes pin 504 will not result in a movementof modified leaf spring mechanism 500′ as whole.

In an embodiment, members F1-F4 are each at an angle around the Z-axisfrom a Y axis through the respective block 503, 505 as illustrated inFIG. 5D. This angle is referred to herein as a flexure angle α. Forexample, member F1 is at a flexure angle α around the Z-axis from a Yaxis through the block 503. The flexure angle of member F1 may vary asthe brake member 507 moves and/or engages with block 503. Similarvariations may occur for flexure angles of members F2-F4. Such variationin flexure angle may occur upon transmittal or application of anexternal force to inner pod 304, and/or due to a force from patterningdevice MA to pin 504.

Upon contact or engagement of brake members 507 and 509 with blocks 503and 505, respectively, members F1-F4 may be at maximum force of staticfriction, or may bend or pivot until a maximum force of static frictionis achieved, at which point brake members 507 and 509 do not slip onblocks 503 and 505. As noted above, in this condition, brake members 507and 509 are said to be self-locked with blocks 503 and 505,respectively. When such self-locking is achieved, each one of membersF1-F4 are at a maximum self-locking flexure angle.

FIG. 5E illustrates the relationship of maximum self-locking angleversus coefficient of friction as plot of the variation of flexure angleα with respect to coefficient of friction μ between brake members 507and 509 and blocks 503 and 505, respectively. In one embodiment, suchvariation of flexure angle is linear with respect to coefficient offriction, although other non-linear variations may occur. By way ofexample only, in one embodiment, for an estimated coefficient offriction μ equal to 0.5 between brake member 507 and block 503 in a dryand clean environment, the maximum self-locking flexure angle isapproximately 27°. It is to be noted that such values of α and μ are byway of example only, and not by way of limitation, and these values maychange depending on other parameters, e.g., material(s) used for makingbrake members 505, 507 and/or blocks 503, 505. By implementing thephysical arrangement of the members F1-F4, brake members 507, 509,blocks 503, 505 and the general location of the patterning device MArelative to the pin 504, conditions can be provided to keep the flexureangle α at or below the maximum in order to implement self-locking.

The self-locking restraining mechanism implemented using modified leafspring mechanism 500′ provides protection of patterning device MA fromsliding, and hence, particle generation. In one embodiment, using thearrangement of FIG. 5D, impact forces of the order of 25 g may beaccommodated without any substantial sliding of patterning device MAresulting therefrom. Exemplary advantages of this arrangement include,but are not limited to, limiting damage to the patterning device MA,preventing sliding of patterning device MA even when it is placedasymmetrically, smaller packaging, and inexpensive shipping of apatterning device MA. For example, the self-locking arrangement of FIG.5D may prevent patterning device MA from sliding in a high-gacceleration impact, and may be used for shipping a patterning deviceMA.

FIG. 6 shows a cross-sectional view of inner pod 304 with blocks 502a-502 c in operational arrangement with cover 306 brought in contactwith base 308 at hollow 430. The pin on fixation block 502 a (e.g., oneof pins 402 a, 402 b, 404 a, or 404 b) is arranged to close a volume 608via a projection 602 on the top surface of cover 306 that alsoaccommodates the pin (in a similar arrangement, pin 504 can close thevolume 608). In this configuration, movement of fixation block 502 adown towards base 308 upon application of a force external to inner pod304 via the pin 402 a, 402 b, 404 a, or 404 b causes fixation block 502c to be pushed towards patterning device MA by block 502 b and the leafsprings in a single motion of blocks 502 a and 502 b. Further, whenouter cover 302 comes in contact with the pin 402 a, 402 b, 404 a, or404 b or more generally when the pin is pushed further towards fixationblock 502 c as a result of the external force (e.g., a reactive forceopposing the force due to base 308 resting on cover 306), fixation block502 a comes into contact with or into near contact with fixation block502 c via contact or near contact of an angled surface 610 of fixationblock 502 a with an angled surface 612 of fixation block 502 c. Asdiscussed above, this contact or near contact arrangement of the angledsurfaces 610, 612 enables a locking opposing force to in-plane movementof patterning device MA to be provided.

Although blocks 502 b and 502 c are coupled by coil spring 606 to movepin 504 of fixation block 502 c towards or away from patterning deviceMA, another type of spring and/or coupling mechanism could be used. Coilspring 606 may aid in opposing frictional forces due to contact of pin504 with patterning device MA and or contact of fixation block 502 cwith second surface 472. As shown in FIG. 6, patterning device MA isplaced on an elevated surface 614 separated from a peripheral surface616 of base 308 by a wall 604. Such separation is advantageous inhelping to prevent contaminant particles that might be present in aregion above peripheral surface 616 from entering a region aboveelevated surface 614, resulting in contamination of patterning deviceMA.

FIG. 7A shows a view of a leaf spring mechanism 700 that has a contactpin 704 and one of pins 406 a-406 d to restrain patterning device MA inthe Z-direction. Contact pin 704 and one of pins 406 a-406 d are coupledtogether by a portion of leaf spring 700 formed by a double leaf springL7. One end 708 of the double leaf spring L7 is connected to the innercover 306 (not shown). The other end of double leaf spring L7 is coupledto one of the pins 406 a-406 d. When the pin 406 a-406 d receives anexternal force (e.g., from cover 302), it moves downward towards base308 and comes into contact with or near contact with fixation block 702inside a volume enclosed by inner cover 306 (not shown). In thisarrangement, L7 forms a cantilever leaf spring arrangement configured toreceive an external force (e.g., from outer cover 302) at pins 406 a-406d coupled to the cantilever leaf spring to clamp patterning device MAusing pin 704. Fixation block 702 is arranged to enable a lockingopposing force to in-plane movement of patterning device MA to beprovided. Such movement by pin 406 a-406 d may result from base 308being brought in contact with cover 306. Regardless of the specificarrangement of forces that cause pin 406 a-406 d to be pushed towardsperipheral surface 616, such a motion of the pin causes clamping ofpatterning device MA by contact pin 704. FIG. 7B shows a side orelevation view of leaf spring mechanism 700. Leaf spring mechanism 500is not shown in FIG. 7B for visual clarity purposes only. However, FIG.7B shows three pins 408 a-408 c on peripheral surface 616 of base 308that provide a limit to movement of in the X-Y plane substantiallyparallel to a patterning surface of patterning device MA.

FIGS. 8A and 8B show an exemplary force distribution for patterningdevice MA in view of contact from pins 704 to restrain patterning deviceMA in the Z-direction and pins 504 to restrain patterning device MA inthe X, Y and θ_(z) directions. In this example, when an external forceis applied at pins 704 (e.g., when outer cover 302 is brought in contactwith inner cover 306), pins 704 are pushed downward towards base 308 toclamp patterning device MA with an exemplary force of 20N at each pointof contact with pins 704. Likewise, an in-plane force is provided byleaf spring mechanism 500 to push fixation block 502 c (or a partthereof, e.g., pin 504 thereupon) to contact patterning device MA. Thein-plane restraining force is provided in a plane substantially parallelto a patterning surface of patterning device MA. Although an exemplaryvalue of 20N force is described in this example, other higher or lowervalues of forces that are sufficient to restrain patterning device MA ina fixed position, but reducing or minimizing generation of particles bycontact and/or sliding of patterning device MA, inner cover 306, innerbase 308, outer cover 302, and/or outer cover 310, could be present.FIG. 8B shows a top/plan view of distribution of forces on patterningdevice MA in the X, Y, and Z directions.

FIG. 9A shows a detailed distribution of forces present at blocks 502a-502 c. For example, when inner pod 304 is in a closed configurationwith outer cover 302 contacting inner pod 304 and outer base 310, blocks502 a-c cooperate to provide a force to the patterning device MA toretain the patterning device MA in the X-Y plane. In particular, theblock 502 b, in the inner surface of inner cover 306, via the spring 606provides a pre-tension force 810 to fixation block 502 c and thuspatterning device MA, as can be appreciated from the arrangement of theblocks 502 a-502 c in FIG. 6. If the patterning device MA moves in theX-Y plane (e.g., slides in an uncontrolled manner due to a largeexternal force), the patterning device MA may exert a force 820 to themechanism 500 via block 502 c. If the force 820 exceeds the pre-tensionforce 810, the excess force 830 may be exerted via block 502 c to block502 a. A holding force 800 provided by the outer cover 302 (acting onpins 406 a-406 d) acts in an opposite direction to such excess force 830and if greater than the excess force 830 will keep the patterning deviceMA in place. Thus, the holding force 800 is particularly designed tokeep angled surfaces 610 and 612 of fixation blocks 502 a and 502 c,respectively, in sliding contact with each other should there be anexcess force 830. Thus, the holding force 800 is designed to besignificantly high to counteract possible expected forces exerted by thepatterning device MA (e.g., the holding force 800 may be designed for 30g or more forces applied by the patterning device MA). An angle A formedbetween surface 612 of fixation block 502 c and surface 610 of fixationblock 502 a may be an acute angle with respect to a direction of thein-plane force. In an embodiment, angle A may be obtuse.

FIG. 9B shows an exemplary coupling of movements of blocks 502 a-502 cof leaf spring mechanism 500 to restrain patterning device MA in asubstantially fixed configuration. For example, as outer cover 302 isbrought in contact with pins 406 a-406 d in a Z-direction towards base308, fixation block 502 a is moved towards base 308 which causes block502 b and pin 504 to simultaneously move towards patterning device MA byleaf spring mechanism 500, as described in FIGS. 5A-5C. Such motion ofblock 502 b further causes fixation block 502 c to move towardspatterning device MA. As noted earlier, additionally or optionally, coilspring 606 may be used to facilitate such movement of block 502 b andfixation block 502 c.

FIG. 10 illustrates a location of a filtering mechanism according to anembodiment of the invention. The filter arrangement includes a filter1000 below or as part of each filter cover 420 a-420 d. Each filter 1000that is a part of filter covers 420 a-420 d may be isolated from theother filters. For example, each filter cover 420 and associated filter1000 may assigned to a particular substantially closed volume associatedwith a particular leaf spring mechanism 500 and 700. Filter 1000 may bea bi-directional or two-way filter used for both pumping gas into innerpod 304 (e.g., volume 608), and for venting gas from inner pod 304(e.g., volume 608), as described in more detail in FIG. 11A. In theexample arrangement shown in FIG. 10, filter 1000 is close to leafspring mechanisms 500 and 700, although the filtering mechanism shown inFIG. 10 may be located anywhere on a surface of cover 306. Filter 1000may include bi-directional or uni-directional filters. In an embodiment,the filter is arranged to allow most, if not all, particles to pass outof the inner pod 304 into a space outside of the inner pod 304 but notto let any, or only few, particles to into the inner pod 304. In anembodiment, the filter is arranged to collect particles whether gas isbeing supplied into inner pod 304 or gas is being vented from inner pod304. The filtering mechanism facilitates maintaining a substantiallyparticle free environment for patterning device MA. For example, pumpinggas into volume 608 may cause particles present in volume 608 to bedisplaced and removed when such gas is vented at a later stage offiltering. In an embodiment, filter 1000 traps particles and when filter1000 is removed from inner cover 306, such particles may be permanentlydiscarded (manually or automatically using a robotic arm, for example)through disposal or cleaning of the filter 1000.

FIG. 11 shows a flow of gas pumped through an embodiment of a filteringmechanism. The direction of flow of the gas in volume 608 is shown byway of block arrows. Gas enters volume 608 via a filter cover 420 a-420d. The gas is filtered by filter 1000 and is directed by a surfaceformed by a plate 1100 above patterning device MA into volume 608.During venting, gas flows out of inner pod 304 and can be shown byreversing the direction of arrows. Particles present in volume 608 aredisplaced by the venting force towards an inner surface 1102 of filter1000 during venting out of gas from volume 608. Advantageously, duringpumping and/or venting, since filter 1100 is at least a portion awayfrom patterning device MA, particles at the filter 1000 (e.g., particlesthat manage to penetrate through filter 1000 into volume 608 or trappedat the inner surface 1102) do not impinge on patterning device MA.Instead, such particles fall or are blown onto plate 1100, therebyreducing or preventing contamination of patterning device MA. Volume 608is sealed at a contact point between inner cover 306 and inner base 308by a seal 1106 at hollow 430. The seal 1106 provides for designflexibility for inner pod 304 since inner base 308 and inner cover 306do not have to be of high flatness. Seal 1106 may be made of a materialthat has a low compression force and a stroke of 0.3 mm, for example.

FIGS. 12A-12C show a groove arrangement to restrain movement of innercover 306 when in contact with inner base 308. In this embodiment, thegroove mechanism comprises three (3) V-shaped grooves V4-V6 attached toperipheral surface 616 of base 308, although other numbers and shapes ofgrooves may be used. FIG. 12A illustrates the groove arrangement withpatterning device MA removed for visual clarity purposes only. It is tobe noted that V-shaped grooves V4-V6 may be located at other locationson peripheral surface 616 of inner base 308. FIG. 12B shows a close-upview of one of the V-shaped grooves V4 or V5. For example, V-shapedgroove V4 or V5 is arranged to receive one of the contact pins/balls B1or B2 on second surface 470 of inner cover 306, as shown in FIG. 4C. Inan embodiment, V-shaped grooves V4-V6 are separable from the base 308and are attached to the peripheral surface 616 of base 308 by one ormore screws 1200 although other mechanisms to attach the V-shapedgrooves V4-V6 to the base 308 may be used. FIG. 12C shows additionalviews of the groove arrangement with V-shaped groove V6 receiving ballB3 of inner cover 306, including a cross-sectional view showing innercover 306 with ball B3 resting on V-shaped groove V6.

FIG. 13 illustrates protection/isolation of patterning device MA from aparticle P generated as a result of contact and/or sliding betweenvarious components of inner pod 304. In this example, particle P is onperipheral surface 616 of inner base 308. However, wall 604 blocks entryof particle P in an area on or above patterning device MA. Additionally,patterning device MA is placed on elevated surface 614 separated from aperipheral surface 616 of base 308 by the wall 604. As a result of thewall 604 and/or elevation of surface 614, a probability of particle Pcoming into contact with the patterning device MA, particularly thesurface of the patterning device MA facing the base 308, is reduced.

According to an embodiment of the invention, there is provided a methodof processing a patterning device MA using a container 300. Patterningdevice MA is configured to impart the beam of radiation with a patternin its cross-section. The method includes placing patterning device MAupon a base 308, coupling an inner cover 306 to the base 308. Innercover 306 has a restraining mechanism that, upon an application of aforce external to inner cover 306, is configured to provide an in-planeforce to patterning device MA to restrain movement of the patterningdevice MA. The in-plane force is in a plane substantially parallel to apatterning surface of patterning device MA. The method further includescoupling the patterning device MA to a support structure MT of alithographic apparatus 1 that includes illuminator IL adapted tocondition the beam of radiation, a substrate table WT configured to holda substrate W, and a projection system PS configured to project apatterned beam from the patterning device MA onto a target portion ofsubstrate W. Furthermore, the method includes filtering contaminantsfrom a volume over or adjacent the patterning device MA using a filter1000. Filter 1000 is not directly above patterning device MA but isseparated therefrom by plate 1100, as shown for example, in FIG. 11.

In an embodiment, there is provided an apparatus, comprising: a baseconfigured to support a patterning device configured to impart a beam ofradiation with a pattern in its cross-section; and an inner covercouplable to the base, the inner cover comprising a restrainingmechanism that, upon an application of a force external to the innercover, is configured to provide an in-plane force to the patterningdevice to restrain movement of the patterning device, the in-plane forcebeing substantially parallel to a patterning surface of the patterningdevice.

In an embodiment, the apparatus further comprises an outer covercouplable to the inner cover to apply the force external to the innercover at at least one point on the inner cover. In an embodiment, therestraining mechanism comprises a leaf spring mechanism to convert theexternal force into the in-plane force. In an embodiment, the leafspring mechanism comprises: a first leaf spring coupled to a firstblock; and a second leaf spring coupled to a second block and coupled tothe first leaf spring, wherein the first block is arranged to receivethe external force. In an embodiment, upon application of the externalforce, the first block moves towards the base in a plane substantiallyperpendicular to the patterning surface to cause the second block tomove in a plane substantially parallel to the patterning surface. In anembodiment, the movement of the second block is configured to push athird block of the restraining mechanism towards the patterning deviceto provide the in-plane force, the third block contacting the patterningdevice. In an embodiment, the second block and the third block arecoupled together by a spring such that when the third block is incontact with the patterning device, the spring is in a compressed stateto oppose movement of the patterning device. In an embodiment, the firstblock has a surface that couples to a surface of the third block suchthat movement of the third block caused by force from the patterningdevice is restrained by the surface of the first block in order torestrain movement of the patterning device. In an embodiment, themovement of the first block causes the first leaf spring to move from afirst position to a second position, further causing the second leafspring to move from a third position to a fourth position, wherein themovement of the second block is actuated by the movement of the secondleaf spring, the movement of the first leaf spring being substantiallyperpendicular to the movement of the second leaf spring. In anembodiment, the base comprises a first surface elevated relative to asecond peripheral surface of the base, wherein, in use, the patterningdevice is supported on the first surface or located within a walldefined by the first surface. In an embodiment, the restrainingmechanism further comprises a cantilever leaf spring attached at one endto the inner cover and configured to receive a force external to theinner cover at another end, the external force causing, in a use, a pinof the cantilever leaf spring to contact the patterning device. In anembodiment, the base comprises a V-shaped groove to accommodate acorresponding pin of the inner cover when the inner cover and the baseare in contact. In an embodiment, the V-shaped groove is removable fromthe base. In an embodiment, the apparatus comprises a seal to providethe only contact between the inner cover and the base to protect thepatterning device from particles or contaminants outside the innercover. In an embodiment, the inner cover comprises a filter arrangedsuch that at least a portion of the filter that is above the patterningdevice is separated from the patterning device by a structure to preventcontamination particles at the filter from falling or impinging directlyonto the patterning device. In an embodiment, the filter is mechanicallyisolated from another filter of the inner cover. In an embodiment, therestraining mechanism comprises: a moveable brake member to receive theforce; and a block, fixed relative to the brake member, to engage withthe moveable brake member. In an embodiment, the moveable brake memberis part of or coupled to a pivotable or flexible member and wherein,upon or when the restraining mechanism engages the patterning device,the pivotable or flexible member is or becomes located at a self-lockingangle relative to the block.

In an embodiment, there is provided a method to process a patterningdevice configured to impart a beam of radiation with a pattern in itscross-section, the method comprising: placing the patterning device upona base; coupling an inner cover to the base, the inner cover comprisinga restraining mechanism; and applying a force external to the innercover to the restraining mechanism such that the restraining mechanismprovides an in-plane force to the patterning device to restrain movementof the patterning device, the in-plane force being substantiallyparallel to a patterning surface of the patterning device.

In an embodiment, the application of the force external to the innercover is performed by bringing an outer cover in contact with the innercover at at least one point on the inner cover. In an embodiment, thebase comprises a first surface elevated relative to a second peripheralsurface of the base and wherein the placing comprises placing thepatterning device on the first surface or on a region located within awall defined by the first surface. In an embodiment, the method furthercomprises filtering contaminants over or adjacent the patterning deviceusing a filter, wherein the filter is not directly above the patterningdevice but is separated therefrom by a structure. In an embodiment, themethod further comprises using the force to move a moveable brake memberto engagement with a block fixed relative to the brake member. In anembodiment, the method further comprises pivoting or bending a member,part of or coupled to the brake member, to a self-locking angle relativeto the block upon, or when, the restraining mechanism engages thepatterning device.

In an embodiment, there is provided an apparatus comprising: a baseconfigured to support a patterning device configured to impart a beam ofradiation with a pattern in its cross-section; and a restrainingmechanism comprising: a first member part of or coupled to a first brakemember, the first member configured to move in a first direction inresponse to an external force to bend or pivot the first member; a firstblock configured to engage the first brake member, wherein the firstmember is configured to move the first brake member into engagement withthe first block; and a pin, coupled to the first member and/or the firstbrake member, configured to transmit a force in the first direction tothe patterning device and to substantially prevent the patterning devicefrom movement.

In an embodiment, the apparatus further comprises a second member partof or coupled to the first brake member, the second member configured tomove in the first direction in response to the external force to bend orpivot the second member, wherein the pin is part of or coupled to thesecond member. In an embodiment, the apparatus further comprises a thirdmember part of or coupled to a second brake member, the third memberconfigured to move in the first direction in response to the externalforce to bend or pivot the third member; a second block configured toengage the second brake member, wherein the third member is configuredto move the second brake member into engagement with the second block;and a fourth member part of or coupled to the second brake member, thefourth member configured to move in the first direction in response tothe external force to bend or pivot the fourth member, wherein the pinis part of or coupled to the fourth member. In an embodiment, the first,the second, the third, or the fourth member is arranged to pivot or bendat an angle with respect to a line substantially perpendicular to thefirst direction. In an embodiment, the angle varies up to a value at orafter which a change in the external force and/or a change in a forcefrom the patterning device does not substantially change the angle, theforce from the patterning device being in a substantially oppositedirection to the first direction. In an embodiment, upon reaching orexceeding the value, the first, the second, the third, or the fourthmember is in a self-locked engagement to the first block or the secondblock, respectively, and does not substantially slip on the first blockor the second block, respectively. In an embodiment, the restrainingmechanism further comprises a leaf spring mechanism configured to bendto aid movement of the pin in the first direction in response to theexternal force. In an embodiment, the force in the first direction tothe patterning device is an in-plane force substantially parallel to apatterning surface of the patterning device. In an embodiment, therestraining mechanism is inside a cover coupled to the base.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,flat-panel displays, liquid-crystal displays (LCDs), thin-film magneticheads, etc. The skilled artisan will appreciate that, in the context ofsuch alternative applications, any use of the terms “wafer” or “die”herein may be considered as synonymous with the more general terms“substrate” or “target portion”, respectively. The substrate referred toherein may be processed, before or after exposure, in for example atrack (a tool that typically applies a layer of resist to a substrateand develops the exposed resist), a metrology tool and/or an inspectiontool. Where applicable, the disclosure herein may be applied to such andother substrate processing tools. Further, the substrate may beprocessed more than once, for example in order to create a multi-layerIC, so that the term substrate used herein may also refer to a substratethat already contains multiple processed layers.

Although specific reference may have been made above to the use ofembodiments of the invention in the context of optical lithography, itwill be appreciated that the invention may be used in otherapplications, for example imprint lithography, and where the contextallows, is not limited to optical lithography. In imprint lithography atopography in a patterning device defines the pattern created on asubstrate. The topography of the patterning device may be pressed into alayer of resist supplied to the substrate whereupon the resist is curedby applying electromagnetic radiation, heat, pressure or a combinationthereof. The patterning device is moved out of the resist leaving apattern in it after the resist is cured.

The lithographic apparatus may also be of a type wherein a surface ofthe substrate is immersed in a liquid having a relatively highrefractive index, e.g. water, so as to fill a space between a finalelement of the projection system and the substrate. Immersion liquidsmay also be applied to other spaces in the lithographic apparatus, forexample, between the patterning device and a first element of theprojection system. Immersion techniques are well known in the art forincreasing the numerical aperture of projection systems.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (UV) radiation (e.g.having a wavelength of or about 365, 248, 193, 157 or 126 nm) andextreme ultra-violet (EUV) radiation (e.g. having a wavelength in therange of 5-20 nm), as well as particle beams, such as ion beams orelectron beams.

The term “lens”, where the context allows, may refer to any one orcombination of various types of optical components, includingrefractive, reflective, magnetic, electromagnetic and electrostaticoptical components.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. For example, the invention may take the form of acomputer program containing one or more sequences of machine-readableinstructions configured to cause performance of a method as disclosedabove, or a computer-readable data storage medium (e.g. semiconductormemory, magnetic or optical disk) having such a computer program storedtherein.

The descriptions above are intended to be illustrative, not limiting.Thus, it will be apparent to those skilled in the art that modificationsmay be made to the invention as described without departing from thescope of the claims set out below.

What is claimed is:
 1. An apparatus, comprising: a base configured tosupport a patterning device configured to impart a beam of radiationwith a pattern in its cross-section; and an inner cover couplable to thebase, the inner cover comprising a restraining mechanism that, upon anapplication of a force external to the inner cover, is configured toprovide an in-plane force to the patterning device to restrain movementof the patterning device, the in-plane force being substantiallyparallel to a patterning surface of the patterning device.
 2. Theapparatus of claim 1, further comprising an outer cover couplable to theinner cover to apply the force external to the inner cover at at leastone point on the inner cover.
 3. The apparatus of claim 1, wherein therestraining mechanism comprises a leaf spring mechanism to convert theexternal force into the in-plane force.
 4. The apparatus of claim 3,wherein the leaf spring mechanism comprises: a first leaf spring coupledto a first block; and a second leaf spring coupled to a second block andcoupled to the first leaf spring, wherein the first block is arranged toreceive the external force.
 5. The apparatus of claim 4, wherein uponapplication of the external force, the first block moves towards thebase in a plane substantially perpendicular to the patterning surface tocause the second block to move in a plane substantially parallel to thepatterning surface.
 6. The apparatus of claim 5, wherein the movement ofthe second block is configured to push a third block of the restrainingmechanism towards the patterning device to provide the in-plane force,the third block contacting the patterning device.
 7. The apparatus ofclaim 6, wherein the second block and the third block are coupledtogether by a spring such that when the third block is in contact withthe patterning device, the spring is in a compressed state to opposemovement of the patterning device.
 8. The apparatus of claim 7, whereinthe first block has a surface that couples to a surface of the thirdblock such that movement of the third block caused by force from thepatterning device is restrained by the surface of the first block inorder to restrain movement of the patterning device.
 9. The apparatus ofclaim 4, wherein the movement of the first block causes the first leafspring to move from a first position to a second position, furthercausing the second leaf spring to move from a third position to a fourthposition, wherein the movement of the second block is actuated by themovement of the second leaf spring, the movement of the first leafspring being substantially perpendicular to the movement of the secondleaf spring.
 10. The apparatus of claim 1, wherein the base comprises afirst surface elevated relative to a second peripheral surface of thebase, wherein, in use, the patterning device is supported on the firstsurface or located within a wall defined by the first surface.
 11. Theapparatus of claim 1, wherein the restraining mechanism furthercomprises a cantilever leaf spring attached at one end to the innercover and configured to receive a force external to the inner cover atanother end, the external force causing, in a use, a pin of thecantilever leaf spring to contact the patterning device.
 12. Theapparatus of claim 1, wherein the base comprises a V-shaped groove toaccommodate a corresponding pin of the inner cover when the inner coverand the base are in contact.
 13. The apparatus of claim 11, wherein theV-shaped groove is removable from the base.
 14. The apparatus of claim1, comprising a seal to provide the only contact between the inner coverand the base to protect the patterning device from particles orcontaminants outside the inner cover.
 15. The apparatus of claim 1,wherein the inner cover comprises a filter arranged such that at least aportion of the filter that is above the patterning device is separatedfrom the patterning device by a structure to prevent contaminationparticles at the filter from falling or impinging directly onto thepatterning device.
 16. The apparatus of claim 15, wherein the filter ismechanically isolated from another filter of the inner cover.
 17. Theapparatus of claim 1, wherein the restraining mechanism comprises: amoveable brake member to receive the force; and a block, fixed relativeto the brake member, to engage with the moveable brake member.
 18. Theapparatus of claim 17, wherein the moveable brake member is part of orcoupled to a pivotable or flexible member and wherein, upon or when therestraining mechanism engages the patterning device, the pivotable orflexible member is or becomes located at a self-locking angle relativeto the block.
 19. A method to process a patterning device configured toimpart a beam of radiation with a pattern in its cross-section, themethod comprising: placing the patterning device upon a base; couplingan inner cover to the base, the inner cover comprising a restrainingmechanism; and applying a force external to the inner cover to therestraining mechanism such that the restraining mechanism provides anin-plane force to the patterning device to restrain movement of thepatterning device, the in-plane force being substantially parallel to apatterning surface of the patterning device.
 20. The method of claim 19,wherein the application of the force external to the inner cover isperformed by bringing an outer cover in contact with the inner cover atat least one point on the inner cover.
 21. The method of claim 19,wherein the base comprises a first surface elevated relative to a secondperipheral surface of the base and wherein the placing comprises placingthe patterning device on the first surface or on a region located withina wall defined by the first surface.
 22. The method of claim 19, furthercomprising filtering contaminants over or adjacent the patterning deviceusing a filter, wherein the filter is not directly above the patterningdevice but is separated therefrom by a structure.
 23. The method ofclaim 19, further comprising using the force to move a moveable brakemember to engagement with a block fixed relative to the brake member.24. The method of claim 23, further comprising pivoting or bending amember, part of or coupled to the brake member, to a self-locking anglerelative to the block upon, or when, the restraining mechanism engagesthe patterning device.
 25. An apparatus comprising: a base configured tosupport a patterning device configured to impart a beam of radiationwith a pattern in its cross-section; and a restraining mechanismcomprising: a first member part of or coupled to a first brake member,the first member configured to move in a first direction in response toan external force to bend or pivot the first member; a first blockconfigured to engage the first brake member, wherein the first member isconfigured to move the first brake member into engagement with the firstblock; and a pin, coupled to the first member and/or the first brakemember, configured to transmit a force in the first direction to thepatterning device and to substantially prevent the patterning devicefrom movement.
 26. The apparatus of claim 25, further comprising asecond member part of or coupled to the first brake member, the secondmember configured to move in the first direction in response to theexternal force to bend or pivot the second member, wherein the pin ispart of or coupled to the second member.
 27. The apparatus of claim 26,further comprising: a third member part of or coupled to a second brakemember, the third member configured to move in the first direction inresponse to the external force to bend or pivot the third member; asecond block configured to engage the second brake member, wherein thethird member is configured to move the second brake member intoengagement with the second block; and a fourth member part of or coupledto the second brake member, the fourth member configured to move in thefirst direction in response to the external force to bend or pivot thefourth member, wherein the pin is part of or coupled to the fourthmember.
 28. The apparatus of claim 25, wherein the first, the second,the third, or the fourth member is arranged to pivot or bend at an anglewith respect to a line substantially perpendicular to the firstdirection.
 29. The apparatus of claim 28, wherein the angle varies up toa value at or after which a change in the external force and/or a changein a force from the patterning device does not substantially change theangle, the force from the patterning device being in a substantiallyopposite direction to the first direction.
 30. The apparatus of claim29, wherein upon reaching or exceeding the value, the first, the second,the third, or the fourth member is in a self-locked engagement to thefirst block or the second block, respectively, and does notsubstantially slip on the first block or the second block, respectively.31. The apparatus of claim 25, wherein the restraining mechanism furthercomprises a leaf spring mechanism configured to bend to aid movement ofthe pin in the first direction in response to the external force. 32.The apparatus of claim 25, wherein the force in the first direction tothe patterning device is an in-plane force substantially parallel to apatterning surface of the patterning device.
 33. The apparatus of claim25, wherein the restraining mechanism is inside a cover coupled to thebase.